JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Deyu, G.K. AU - Blick, R.H. AU - González Díaz-Palacio, I. AU - Hillert, W. AU - Wenskat, M. AU - Zierold, R. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Schaa, Volker R.W. ED - Thomas, Paul W. TI - Successful Al₂O₃ Coating of Superconducting Niobium Cavities by Thermal ALD J2 - Proc. of SRF2023, Grand Rapids, MI, USA, 25-30 June 2023 CY - Grand Rapids, MI, USA T2 - International Conference on RF Superconductivity T3 - 21 LA - english AB - Al₂O₃ is one of the potential insulator materials in the superconductor-insulator-superconductor (SIS) multilayer coatings of superconducting radio-frequency (SRF) cavities for pushing their performance limits. We report on the successful coating of two 1.3 GHz Tesla-shaped SRF cavities with 18 nm and 36 nm layers of Al₂O₃ deposited by thermal atomic layer deposition (ALD). The coating recipe was developed by thermal atomic layer deposition (ALD). The coating recipe was optimized with respect to different the applied process parameters such as exposure and purge times, substrate temperature and flow rates. After a proof-of-principle Al₂O₃ coating of a cavity, second the cavity maintained its maximum achievable accelerating field of more than 40 MV/m and no deterioration was observed [1]. On the contrary, an improvement of the surface resistance above 10 MV/m has been observed, which is now further under investigation. PB - JACoW Publishing CP - Geneva, Switzerland SP - 104 EP - 108 KW - cavity KW - niobium KW - SRF KW - HOM KW - experiment DA - 2023/09 PY - 2023 SN - 2673-5504 SN - 978-3-95450-234-9 DO - doi:10.18429/JACoW-SRF2023-MOPMB016 UR - https://jacow.org/srf2023/papers/mopmb016.pdf ER -