JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Seal, D.J. AU - Burt, G. AU - Conlon, J.A. AU - Malyshev, O.B. AU - Morrow, K.T. AU - Valizadeh, R. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Schaa, Volker R.W. ED - Thomas, Paul W. TI - Optimisation of Niobium Thin Film Deposition Parameters for SRF Cavities J2 - Proc. of SRF2023, Grand Rapids, MI, USA, 25-30 June 2023 CY - Grand Rapids, MI, USA T2 - International Conference on RF Superconductivity T3 - 21 LA - english AB - In order to accelerate the progression of thin film (TF) development for future SRF cavities, it is desirable to optimise material properties on small flat samples. Most importantly, this requires the ability to measure their superconducting properties. At Daresbury Laboratory, it has been possible for many years to characterise these films under DC conditions; however, it is not yet fully understood whether this correlates with RF measurements. Recently, a high-throughput RF facility was commissioned that uses a novel 7.8 GHz choke cavity. The facility is able to evaluate the RF performance of planar-coated TF samples at low peak magnetic fields with a high throughput rate of 2-3 samples per week. Using this facility, an optimisation study of the deposition parameters of TF Nb samples deposited by HiPIMS has begun. The ultimate aim is to optimise TF Nb as a base layer for multilayer studies and replicate planar magnetron depositions on split 6 GHz cavities. The initial focus of this study was to investigate the effect of substrate temperature during deposition. A review of the RF facility used and results of this study will be presented. PB - JACoW Publishing CP - Geneva, Switzerland SP - 253 EP - 258 DA - 2023/09 PY - 2023 SN - 2673-5504 SN - 978-3-95450-234-9 DO - doi:10.18429/JACoW-SRF2023-MOPMB062 UR - https://jacow.org/srf2023/papers/mopmb062.pdf ER -