JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - Kalboussi, Y. AU - Antoine, C.Z. AU - Asaduzzaman, M. AU - Baudrier, M. AU - Bertrand, Q. AU - Boulch, C. AU - Delatte, B. AU - Dragoe, D. AU - Jullien, G. AU - Junginger, T. AU - Lochet, N. AU - Longuevergne, D. AU - Maurice, L. AU - Miserque, F. AU - Proslier, Th. AU - Pépin-Donat, T. AU - Sahuquet, P. AU - Vacher, T.V. AU - Éozénou, F. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Schaa, Volker R.W. ED - Thomas, Paul W. TI - Surface Engineering by ALD for Superconducting RF Cavities J2 - Proc. of SRF2023, Grand Rapids, MI, USA, 25-30 June 2023 CY - Grand Rapids, MI, USA T2 - International Conference on RF Superconductivity T3 - 21 LA - english AB - Atomic Layer Deposition is a synthesis method that enable a unique control of thin films chemical composition and thickness over complex shape objects such as SRF cavities. This level of control opens the way to new surface treatments and to study their effect on RF cavity performances. We will present coupon and, in some cases, preliminary cavity results, from various surface engineering routes based on the deposition of thin oxides and nitrides films combined with post annealing treatments and study their interactions with the niobium. Three main research directions will be presented: 1/ replacing the niobium oxides by other surface layers (Al₂O₃, Y2O3, MgO) and probe their effect on the low and high field performances, 2/ doping with N and combine approaches 1/ and 2/ and finally 3/ optimize the superconducting properties of NbTiN multilayers on Nb and Sapphire. PB - JACoW Publishing CP - Geneva, Switzerland SP - 615 EP - 620 KW - cavity KW - niobium KW - vacuum KW - SRF KW - site DA - 2023/09 PY - 2023 SN - 2673-5504 SN - 978-3-95450-234-9 DO - doi:10.18429/JACoW-SRF2023-WEIBA01 UR - https://jacow.org/srf2023/papers/weiba01.pdf ER -