JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
@inproceedings{he:srf2023-wepwb001, author = {P. He and J. Dai and H.C. Duan and J.W. Kan and Y. Ma and T. Xin and Y.C. Yang and P. Zhang}, % author = {P. He and J. Dai and H.C. Duan and J.W. Kan and Y. Ma and T. Xin and others}, % author = {P. He and others}, title = {{Preparation and Characterization of Nb Films Deposited in SRF Cavity via HiPIMS}}, % booktitle = {Proc. SRF'23}, booktitle = {Proc. 21th Int. Conf. RF Supercond. (SRF'23)}, pages = {651--654}, eid = {WEPWB001}, language = {english}, keywords = {cavity, SRF, niobium, site, lattice}, venue = {Grand Rapids, MI, USA}, series = {International Conference on RF Superconductivity}, number = {21}, publisher = {JACoW Publishing, Geneva, Switzerland}, month = {09}, year = {2023}, issn = {2673-5504}, isbn = {978-3-95450-234-9}, doi = {10.18429/JACoW-SRF2023-WEPWB001}, url = {https://jacow.org/srf2023/papers/wepwb001.pdf}, abstract = {{The RF performance of the niobium superconducting cavity has been continuously improved in recent 50 years. Since the maximum acceleration field (E_{acc}) has approached its theoretical limit, developing a more efficient and low-cost SRF cavity is one of the key challenges of the next generation particle accelerators. Niobium coated copper cavities are promising solutions because the SRF phenomenon occurrs within several hundred nanometers under the cavity surface. In literatures, the Nb coated Cu cavity prepared by direct current magnetron sputtering (DCMS) has serious Q-slope problem, which may be related to the low energy deposition. High power impulse magnetron sputtering (HiPIMS) can produce a high peak power and high ionization rate which may improve the thin film quality. Therefore, we prepared Nb coated Cu samples via HiPIMS on the 1.3 GHz dummy cavity at IHEP.}}, }