JACoW is a publisher in Geneva, Switzerland that publishes the proceedings of accelerator conferences held around the world by an international collaboration of editors.
TY - CONF AU - He, P. AU - Dai, J. AU - Duan, H.C. AU - Kan, J.W. AU - Ma, Y. AU - Xin, T. AU - Yang, Y.C. AU - Zhang, P. ED - Saito, Kenji ED - Xu, Ting ED - Sakamoto, Naruhiko ED - Schaa, Volker R.W. ED - Thomas, Paul W. TI - Preparation and Characterization of Nb Films Deposited in SRF Cavity via HiPIMS J2 - Proc. of SRF2023, Grand Rapids, MI, USA, 25-30 June 2023 CY - Grand Rapids, MI, USA T2 - International Conference on RF Superconductivity T3 - 21 LA - english AB - The RF performance of the niobium superconducting cavity has been continuously improved in recent 50 years. Since the maximum acceleration field (E_{acc}) has approached its theoretical limit, developing a more efficient and low-cost SRF cavity is one of the key challenges of the next generation particle accelerators. Niobium coated copper cavities are promising solutions because the SRF phenomenon occurrs within several hundred nanometers under the cavity surface. In literatures, the Nb coated Cu cavity prepared by direct current magnetron sputtering (DCMS) has serious Q-slope problem, which may be related to the low energy deposition. High power impulse magnetron sputtering (HiPIMS) can produce a high peak power and high ionization rate which may improve the thin film quality. Therefore, we prepared Nb coated Cu samples via HiPIMS on the 1.3 GHz dummy cavity at IHEP. PB - JACoW Publishing CP - Geneva, Switzerland SP - 651 EP - 654 KW - cavity KW - SRF KW - niobium KW - site KW - lattice DA - 2023/09 PY - 2023 SN - 2673-5504 SN - 978-3-95450-234-9 DO - doi:10.18429/JACoW-SRF2023-WEPWB001 UR - https://jacow.org/srf2023/papers/wepwb001.pdf ER -