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RIS citation export for WEPWB001: Preparation and Characterization of Nb Films Deposited in SRF Cavity via HiPIMS

TY  - CONF
AU  - He, P.
AU  - Dai, J.
AU  - Duan, H.C.
AU  - Kan, J.W.
AU  - Ma, Y.
AU  - Xin, T.
AU  - Yang, Y.C.
AU  - Zhang, P.
ED  - Saito, Kenji
ED  - Xu, Ting
ED  - Sakamoto, Naruhiko
ED  - Schaa, Volker R.W.
ED  - Thomas, Paul W.
TI  - Preparation and Characterization of Nb Films Deposited in SRF Cavity via HiPIMS
J2  - Proc. of SRF2023, Grand Rapids, MI, USA, 25-30 June 2023
CY  - Grand Rapids, MI, USA
T2  - International Conference on RF Superconductivity
T3  - 21
LA  - english
AB  - The RF performance of the niobium superconducting cavity has been continuously improved in recent 50 years. Since the maximum acceleration field (E_{acc}) has approached its theoretical limit, developing a more efficient and low-cost SRF cavity is one of the key challenges of the next generation particle accelerators. Niobium coated copper cavities are promising solutions because the SRF phenomenon occurrs within several hundred nanometers under the cavity surface. In literatures, the Nb coated Cu cavity prepared by direct current magnetron sputtering (DCMS) has serious Q-slope problem, which may be related to the low energy deposition. High power impulse magnetron sputtering (HiPIMS) can produce a high peak power and high ionization rate which may improve the thin film quality. Therefore, we prepared Nb coated Cu samples via HiPIMS on the 1.3 GHz dummy cavity at IHEP.
PB  - JACoW Publishing
CP  - Geneva, Switzerland
SP  - 651
EP  - 654
KW  - cavity
KW  - SRF
KW  - niobium
KW  - site
KW  - lattice
DA  - 2023/09
PY  - 2023
SN  - 2673-5504
SN  - 978-3-95450-234-9
DO  - doi:10.18429/JACoW-SRF2023-WEPWB001
UR  - https://jacow.org/srf2023/papers/wepwb001.pdf
ER  -