Author: Delatte, B.
Paper Title Page
WEIBA01 Surface Engineering by ALD for Superconducting RF Cavities 615
 
  • Y. Kalboussi, C.Z. Antoine, M. Baudrier, Q. Bertrand, C. Boulch, B. Delatte, G. Jullien, L. Maurice, Th. Proslier, P. Sahuquet, T.V. Vacher
    CEA-IRFU, Gif-sur-Yvette, France
  • M. Asaduzzaman, T. Junginger
    UVIC, Victoria, Canada
  • M. Asaduzzaman
    TRIUMF, Vancouver, Canada
  • D. Dragoe
    ICMMO, Orsay, France
  • F. Éozénou
    CEA-DRF-IRFU, France
  • N. Lochet
    CEA, DES, Université Paris-Saclay, Gif-sur-Yvette, France
  • D. Longuevergne, T. Pépin-Donat
    Université Paris-Saclay, CNRS/IN2P3, IJCLab, Orsay, France
  • F. Miserque
    CEA, LECA, Université Paris-Saclay, Gif-sur-Yvette, France
 
  Atomic Layer Deposition is a synthesis method that enable a unique control of thin films chemical composition and thickness over complex shape objects such as SRF cavities. This level of control opens the way to new surface treatments and to study their effect on RF cavity performances. We will present coupon and, in some cases, preliminary cavity results, from various surface engineering routes based on the deposition of thin oxides and nitrides films combined with post annealing treatments and study their interactions with the niobium. Three main research directions will be presented: 1/ replacing the niobium oxides by other surface layers (Al₂O₃, Y2O3, MgO) and probe their effect on the low and high field performances, 2/ doping with N and combine approaches 1/ and 2/ and finally 3/ optimize the superconducting properties of NbTiN multilayers on Nb and Sapphire.  
slides icon Slides WEIBA01 [13.613 MB]  
DOI • reference for this paper ※ doi:10.18429/JACoW-SRF2023-WEIBA01  
About • Received ※ 06 July 2023 — Revised ※ 12 August 2023 — Accepted ※ 19 August 2023 — Issue date ※ 19 August 2023
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