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| WEPWB001 |
Preparation and Characterization of Nb Films Deposited in SRF Cavity via HiPIMS |
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- P. He, J. Dai, H.C. Duan, J.W. Kan, Y. Ma, T. Xin, Y.C. Yang, P. Zhang
IHEP, Beijing, People’s Republic of China
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The RF performance of the niobium superconducting cavity has been continuously improved in recent 50 years. Since the maximum acceleration field (Eacc) has approached its theoretical limit, developing a more efficient and low-cost SRF cavity is one of the key challenges of the next generation particle accelerators. Niobium coated copper cavities are promising solutions because the SRF phenomenon occurrs within several hundred nanometers under the cavity surface. In literatures, the Nb coated Cu cavity prepared by direct current magnetron sputtering (DCMS) has serious Q-slope problem, which may be related to the low energy deposition. High power impulse magnetron sputtering (HiPIMS) can produce a high peak power and high ionization rate which may improve the thin film quality. Therefore, we prepared Nb coated Cu samples via HiPIMS on the 1.3 GHz dummy cavity at IHEP.
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| DOI • |
reference for this paper
※ doi:10.18429/JACoW-SRF2023-WEPWB001
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| About • |
Received ※ 15 June 2023 — Revised ※ 29 June 2023 — Accepted ※ 19 August 2023 — Issue date ※ 20 August 2023 |
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